声表面波气体传感器研究进展

Advances in SAW Gas Sensors

从机理模型构建、物理功能结构优化两方面出发对覆盖聚合物敏感膜的高性能声表面波(SAW)气体传感器技术进行了研究和探讨。实验研制了一种以具有高频率稳定性的声表面波延迟线型振荡器为传感元,结合六氟异丙醇基聚硅氧烷敏感膜的SAW传感器,开展了针对DMMP的检测实验,检测下限与检测灵敏度分别达到了0.04mg/m3和485Hz/mg/m3。

In this paper,the high performance polymer sensitive membrane covering the surface acoustic wave(SAW) gas sensor technology is studied and discussed from the two aspects of mechanism modeling,physical function and structure optimization.In order to improve the threshold detection limit,the SAW dual-delay line oscillator with excellent frequency stability was designed for the gas sensor.Using the fluoroalcoholpolysiloxane as sensor material,the fabricated SAW gas sensorwas utilized for dimethylmethylphosphonate(DMMP) detection.Very low threshold detection limit of 0.04 mg/m3 and excellent sensitivity of 485 Hz/mg/m3 were achieved for a DMMP detection experiment.