摘要
采用介电电泳技术组装制备PEDOT/PSS-SWCNTs纳米气敏薄膜,并研究外加交流电场的频率、电压及组装时间与气体传感器的导电及气敏性能的关系。结果表明,良好分散在PEDOT/PSS基质中的SWCNTs定向排列在叉指电极对之间。当频率在0.5～10MHz的范围内,传感器的电导率及气敏响应的变化不大。由电场电压引起的传感器性能的变化趋势与组装时间引起的相似,即随着电压或时间增大,传感器的电阻增大,而气敏响应则先增后减。当电场频率为2MHz、电压为5V、组装时间为3min时,PEDOT/PSS-SWCNTs纳米气敏传感器对10-9级别的H2S气体最为灵敏。
In this paper,the gas sensor was fabricated by the PEDOT/PSS–SWCNTs nanocomposite film which assembled via dielectrophoretic technology.The relationships between the dielectrophoretic parameters include the voltage and frequency of the applied AC field as well as the process time,and the conductivity and gas-sensing capability of the gas sensor were discussed.The results showed that SWCNTs dispersed well in the PEDOT/PSS matrix,and aligned orderly between the finger electrodes.The frequency of AC field had little influence on the gas sensor properties when it varied from 0.5 to 10 MHz.The changes of the sensor properties aroused by the applied voltage were similar to the ones aroused by the process time.With the increasing voltage or process time,the conductivity of the sensor increased gradually,while the sensor response increased at first and then decreased.When the frequency was 2 MHz,the voltage was 5 V and the process time was 3 min,the gas sensor exhibited the best sensitivity to the ppb-level H2S vapors.
出处
《真空电子技术》
2013年第2期14-18,42,共6页
Vacuum Electronics
基金
国家科技支撑计划(No.2011BAF02B06)
浙江省科技计划项目(No.2010C33020)
