步进式压电作动器的结构设计

Structure Design of the Stepping Piezoelectric Actuator

为了将压电作动器用于光学领域,设计了一种利用压电叠堆作为驱动元件的作动器,研究了压电叠堆作动器的步进特性。首先,说明了作动器的放大效应是基于三角放大原理;然后,通过ANSYS的APDL语言实现了对原三角结构尺寸的优化;最后,用激光干涉仪测得作动器的放大倍数可以到达7,并且通过加载阶梯电压,验证了其步进精度可达22nm,实现了纳米级的定位和工作,为该款作动器在高精度显微镜上的应用打下了基础。

Based on the triangle amplification principle,an actuator driven by the Piezoelectric stack was made.The paper first introduced the amplification principle,then optimized the structure size using the APDL language of ANSYS,finally the experiment confirmed the amplification factor can reach 7.The actuator's stepping resolution was about 20nanometer which can well realize nanometer scale location and made foundation for the application of this kind actuator in high precision microscope.