热CVD制备定向竹节型碳纳米管生长机制分析

Growth mechanism of aligned bamboo-like CNTs prepared by thermal CVD

用热化学气相沉积(CVD)技术,用乙炔为碳源,氮气为载气,氢气为还原气体,氨气为刻蚀气体,在单晶硅上制备出定向竹节型结构碳纳米管薄膜。用透射电镜(TEM),扫描电镜(SEM)的X衍射能量色散能谱仪(EDS)和X射线衍射仪(XRD)分析碳纳米管的精细结构,成分和晶型及结晶度,并对制备的碳纳米管的生长机制进行分析和推测。结果表明:在生长碳纳米管的过程中起催化作用的是金属镍颗粒而不是碳化镍,催化剂颗粒呈不同的形貌存在碳纳米管顶部,并遵循顶端生长方式。

The aligned bamboo-like carbon nanotubes( CNTs) film was grown on a large area of nickel-deposited single silicon substrate by thermal chemical vapor deposition( CVD) using C2H2 gas at different temperature. Internal fine structure,composition and crystallization of CNTs were analyzed by means of transmission electron microscopy( TEM),scanning electron microscopy( SEM) self provided energy dispersive X-ray spectroscopy( EDS) and X-Ray Diffractomer( XRD). The growth mechanism of the aligned bamboo-like CNTs was analyzed. The results show that it plays a catalytic role in the process of growth of CNTs are metallic nickel particles rather than nickel carbide,the catalyst particles with different morphology exists at the top in CNTs and follow tip growth mode.