阴极弧离子镀AlCrN涂层高温氧化后XPS分析

XPS analysis of high temperature oxidation behavior for Al Cr N coating prepared by cathodic arc ion plating

采用阴极弧离子镀方法在Ti C基金属陶瓷刀具表面沉积了Al Cr N涂层,进行了900℃下2 h高温氧化试验。通过SEM、EDS、XRD、XPS等手段分析了Al Cr N涂层高温氧化前后表面形貌、元素组成、物相组成及元素结合能,并讨论了Al Cr N涂层高温氧化及失效机理。结果表明,氧化前Al Cr N涂层由Al N、Cr N和Cr2N物相组成,其中Cr N表现出(200)的择优取向,氧化后其物相转变为抗高温的Al2O3、Cr3O4和Ti4O3氧化物;氧化前Al Cr N涂层中Al和N以Al—N键、Cr和N以Cr—N键存在,氧化后Al与O以Al—O键、Cr与O以Cr—O键方式存在,在涂层-基体结合界面处形成了致密的扩散层。

Al Cr N coating was prepared on the Ti C-based cermet cutting tool by cathodic arc ion plating,and the high temperature oxidation test was conducted at 900 ℃ for 2 h. The surface and interface morphology,chemical composition,phase structure,and element binding energy of the coating oxides were analyzed with SEM( scanning electron microscopy),EDS( energy dispersive spectrometer),XRD( Xray diffraction) and XPS( X-ray photoelectron spectroscopy) respectively,and the failure mechanism of Al Cr N coating during high temperature oxidation was discussed. The results show that the phases of Al Cr N coating are composed of Al N,Cr N and Cr2 N,in which Cr N shows preferred orientation at( 200) before oxidation,while those of Al Cr N coating are composed of oxides with high temperature resistance such as Al2O3,Cr3O4 and Ti4O3after oxidation. Al and N,Cr and N of Al Cr N coating exist at Al—N key,Cr—N key,respectively before oxidation,while Cr and O,Al and O of Al Cr N coating exist at Cr—O key,Al—O key,respectively after oxidation,and the dense diffusion layer is formed at the coating-substrate interface.