热处理工艺对溶胶-凝胶法制备ZnO:Al薄膜光电性能的影响

Influence of Heat Treatment on Electro-optical Properties of Al-doped ZnO Thin Films Prepared by Sol-Gel Method

采用溶胶-凝胶法以提拉的方式在普通玻璃基底上制备出ZnO:Al(AZO)薄膜。通过X射线衍射仪、场发射扫描电子显微镜、方块电阻测试仪、Hall效应测试仪、紫外-可见-红外分光光度计研究了薄膜物相、微观结构、光电性能;分析了不同热处理方式对于薄膜光电性能的影响。结果表明:经10次提拉所制备薄膜可见光透过率85%左右。热处理工艺的选择对于提升AZO薄膜的电学性能至关重要,相比于空气气氛和真空下的热处理,采用具有还原性的5%H_2和95%N_2的混合气氛热处理得到了具有最好电学性能的AZO薄膜。在550℃还原气氛下保温60 min得到薄膜方块电阻约为300Ω/□,电阻率约为3.3×10^(-3)Ω·cm。

Aluminum doped zinc oxide(AZO) films were prepared on a glass substrate by a sol-gel dip-coating process.The phase,microstructure and electro-optical properties of AZO films were investigated by X-ray diffraction,field emission scanning electron microscope,four-probe resistance meter,Hall-effect tester and UV-visible-infrared spectrophotometer,respectively.The influence of heat treatment on the electro-optical properties of AZO films was also analyzed.The results show that the visible light transmittance of AZO films prepared by pulling for 10 times is 85%.The heat treatment is crucial for enhancing the electrical properties of AZO films,and the better electrical properties are obtained when AZO films are annealed in a mixed atmosphere of 5%H_2 and 95%N_2,compared to that with vacuum annealed or in air.The sheet resistance and resistivity of AZO films are 300 Ω/□ and 3.3×10^(-3)Ω·cm after annealed in a reducing atmosphere at 550℃ for 60 min.