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磁控溅射沉积高承载、低摩擦MoS_2/Ti复合薄膜 被引量:15

High Load Bearing Capacity and Low Friction of MoS_2/ Ti Composite Films by Magnetron Sputtering
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摘要 采用磁控溅射技术制备了不同Ti含量的Mo S2/Ti复合薄膜,利用SEM、AFM、纳米压痕仪、XRD和CSM摩擦试验机分析了复合薄膜的结构、力学和摩擦学性能.结果表明:复合薄膜结构致密,表面光滑平整,且具有较高的硬度,Ti含量较低的Mo S2/Ti复合薄膜呈现以(002)基面为主的择优取向;在大气环境下,赫兹接触应力为2.5 GPa的摩擦工况下,Ti含量较低的Mo S2/Ti复合薄膜的摩擦系数低至0.02,磨损率低至10-17m3/(N·m)数量级,呈现出高承载、低摩擦、耐磨损的优异摩擦学性能.这是由于Ti的掺杂一方面提高了复合薄膜的力学和抗氧化性能,另一方面复合薄膜的(002)基面取向对其摩擦磨损性能发挥了重要作用. The Mo S2/ Ti composite films with different Ti contents were produced by magnetron sputtering system. The mechanical and tribological performances of composite films were analyzed by scanning electron microscopy,atomic force microscopy,Nano- indenter,X- ray diffraction and CSM tribometer. Results showed that the structures of composite films were compact and dense,and the surfaces were smooth. The hardness of Mo S2/ Ti composite film was higher than that of the pure Mo S2 film. The Mo S2/ Ti composite films with low Ti contents presented the preferential orientation of( 002) basal plane. For the Mo S2/ Ti composite films with low Ti content,on the Hertz contact stress of 2. 5 GPa in atmosphere,the friction coefficients were as low as 0. 02 and the wear rates were on the order of magnitudes 10- 17m3/( N · m). In addition,the films presented the high load bearing capaticy. The excellent tribological performances could be ascribed to two reasons: on the one hand,the mechanical properties and oxidation resistance were improved by doping Ti,on the other hand,the( 002) basal plane played a significant role in the tribological performances of Mo S2/ Ti composite films.
出处 《摩擦学学报》 EI CAS CSCD 北大核心 2015年第3期259-265,共7页 Tribology
基金 国家重点基础研究发展规划项目(973)(2011CB706603) 国家自然科学基金(51322508)资助~~
关键词 MoS2/Ti复合薄膜 高承载 (002)基面 摩擦学性能 MoS2/ Ti composite films,high load bearing capacity,(002) basal planes,tribological performances
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