湿热环境对Ge基中波减反射膜可靠性的影响

Reliability of Ge-based MW antireflective films in hygrothermal environment

采用双面抛光的锗片为基底,镀制中波减反射膜,在湿热环境中分别持续24h、2×24h、3×24h、4×24h、5×24h、…、12×24h之后,研究了湿热环境对Ge基中波减反射膜的光学特性、牢固性等可靠性的影响。实验结果表明:在现有工艺条件下,所镀制的Ge基中波减反射膜经不同时间的湿热环境之后,透过率逐渐变低,并出现CO2和H2O的特征吸收峰,吸收峰是减反射膜长时间持续在湿热环境下CO2和H2O含量增大所致;湿热环境10×24h后,边缘膜层开始出现脱落现象,12×24h后,膜层平均透过率低于85%。

Mid‐wave (MW ) antireflective films were coated on double‐side polished Ge sub‐strate ,and the films were experimented in hygrothermal environment for sustaining 24 h ,2 × 24 h ,3 × 24 h ,4 × 24 h ,5 × 24 h ,7 × 24 h ,? ,12 × 24 h ,respectively .The effects of hygrother‐mal environment on the reliability including transmittance and adhesion of Ge‐based M W an‐tireflective films were studied .The results indicate that ,the transmittance of MW antireflec‐tive films becomes lower gradually after sustained in the hygrothermal environment ,and the absorption peak of CO2 and H2 O turnes up ,resulted from the increase of the content of CO2 and H2 O in the films sustained under hygrothermal environment for enough time;The fringe of film becomes desquamated after 10 × 24 h in hygrothermal environment ,and from that time , the average transmittance is lower than 85% .