基于双频激光干涉仪的显微模板精密测量

Precision measurement of microscopic module through dual-frequency laser interferometer

为了对光纤阵列测量的高精度显微模板进行精密检测,采用双频激光干涉仪结合显微视觉系统,通过骨架化、腐蚀法、质心法等算法对显微图像进行计算处理,实现模板特征刻线的提取与精确定位。对模板上8条刻度线之间的间距分别进行重复测量和组合测量,实验结果表明重复测量的标准偏差不大于0.07μm,组合测量的标准偏差不大于0.04μm。介绍了测量系统构成与工作原理,并对测量过程进行了精度分析,分析结果表明测量过程的极限误差不大于0.10μm。

In order to accurately measure the high‐precision microscopic module of optic fiber ar‐ray ,a method combined a dual‐frequency laser interferometer with a micro‐vision system was adopted .The characterized scale was extracted and located precisely from the micro‐vision im‐age by way of skeletonization ,erosion algorithm and the centroid method .The spaces between 8 scales were repetitively measured ,with the maximum standard deviation being no more than 0 .07 μm .These 8 scales were further measured through the combination method ,with the maximum standard deviation being no more than 0 .04 μm .The configuration and principle of the measurement system were described .Accuracy analysis indicates that the limit error of the method is less than 0 .10 μm .