沉积温度对氧化锌薄膜结构和光学性能的影响

Effect of Deposition Temperature on Structure and Optical Properties of Zinc Oxide Films Prepared by Sputtering

采用射频磁控溅射方法在玻璃基板上制备了氧化锌(ZnO)薄膜样品,利用X射线衍射(XRD)表征和紫外-可见光透射光谱对其进行了表征,研究了沉积温度对ZnO薄膜结构和光学性能的影响.结果表明:所有ZnO样品都是c轴高度择优取向的多晶薄膜;沉积温度对ZnO样品晶体质量和光学性能都具有明显的影响;随着沉积温度的升高,ZnO薄膜(002)衍射峰的半高宽单调减小,而(002)晶面取向度、平均晶粒尺寸和可见光波段平均透过率则单调增大.当沉积温度为500°C时,ZnO薄膜样品具有最高的(002)晶面取向度(0.987)、最大的平均晶粒尺寸(22.1 nm)和最好的可见光波段平均透过率(82.3%).

The thin films of zinc oxide ( ZnO) were prepared on glass substrates by radio frequency magnetron sputtering method using a sintered ceramic target of ZnO (99.99%in purity).The effects of deposition temperature on structure and optical properties of ZnO thin films were investigated by X-ray diffractometer and spectrophotometer , respectively .The experimental results show that the deposited ZnO thin films with the hexagonal crystal structure are polycrystalline and have a strongly preferred orientation of (002) plane.The structure and optical properties of the thin films are subjected to the deposition temperature .As the deposition temperature increases , the preferred orientation of (002) plane, crystal size and average transmittance in the visible range increase monotonically , while the full widths at half maximum decreases gradually .The ZnO sample prepared at the deposition temperature of 500 °C has the best crystallite quality and optical properties, with the highest preferred orientation of (002) plane (0.987), the largest average crystal size (22.1 nm) and the highest average transmittance in the visible range (82.3%).