CMOS二维风速计控制及检测电路的研究

Study on the controlling and measuring circuits of the two-dimensional CMOS silicon wind sensor

针对CMOS二维风速风向传感器的工作原理,分析了传感器的控制电路及其特点,并根据该类传感器的特点,重点探讨了信号检测处理电路的形式和特点。拟采用恒温差或者温度平衡控制模式实现对加热器的控制,用斩波放大技术或热Σ-Δ调制技术构建信号处理电路,用标准CMOS工艺实现传感器和控制处理电路的系统集成。

After a brief introduction of the operational principle,we focus on the working modes and the circuits that realize them as well as the signal sensing and managing circuits. We make some analyses of these working modes and those signal processing circuits and prefer the constant temperature difference(CTD)mode and the temperature balance(TB)mode,use the chopper amplifier or thermal Σ-Δ modulator to deal with the output signals of the thermopiles of the wind sensor,as well as integrate the wind sensor and its interface circuits as a whole system.