压阻式复合加速度传感器的研究

Research on piezoresistive complexed accelerometer

对压阻式复合惯性加速度传感器的惯性变换系统的结构、特性、工作原理进行了分析讨论,建立了数学模型,所设计的惯性式弹性敏感元件,能分别将线加速度产生的惯性力及角加速度产生的惯性力矩转换成弹性梁的变形,通过应变计及电路将此变形转换成为可测的电学量。并能通过合理组合的测量电桥,消除线加速度及角加速度之间交叉耦合影响。试验证明:该惯性系统设计合理,它可以作为线加速度及角加速度复合测量用。

The construction characteristic,working principle of the complex transformation system in the piezoresistive accelerometer are analyzed and discussed, the mathematics model is established,the designed flexibility sensitive component can transform the inertial force and moment produced by line acceleration and angle acceleration to the distortion of the flexibility beam.By using the strain gauge and the circuit, the distortion is transformed to the electricity parameter that can be measured.Further more, the cross coupling infection of the line acceleration and the angle acceleration can be dissolved by the reasonable combined eletricity bridge.It's approved by experiment that the system design is reasonable, and can be used in the line acceleration and angle acceleration measurment.