对高级别洁净厂房空调设计的探讨

Probe on the HVAC System Design in Cleanrooms of High Level Cleanliness Class

微电子、光电子产业是国民经济和科学技术的基础,发展迅速,更新换代快,对环境要求严格,初投资高、运行费大,要求安全、可靠、灵活,对这样的洁净厂房,本文提出一些行之有效的方法,供设计参考。

As the foundation for national economy and science and technology, the industries of microelectronics and photoelectronics are characterized with fast development, quick new generation emerging,strict requirements for environment, and high primary cost and operation cost, while their safety, reliability and flexibility are required. With regard to the cleanroom for above industries, some methods are discussed as reference for effective design.