Si基光电子集成器件研究进展
摘要
Si 基光电子集成已成为十分引人注目的研究课题,其工艺与 CMOS 工艺完全兼容,可以实现低成本的 Si 基光电子集成器件。本文综述近几年来 Si 基光电子集成器件的发展以及一些最新的研究进展,并对器件研制、发光机理和应用前景等方面做了详细的叙述。
出处
《黑龙江科技信息》
2004年第6期75-75,共1页
Heilongjiang Science and Technology Information
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