Sn离子注入PTC陶瓷表面研制气敏陶瓷材料

Study on Gas -Sensing Ceramic Material with Sn Ions Implanted in the Surface of PTC Ceramic

用脉冲金属离子束Sn注入BaTiO_3 PTC陶瓷的表面,结果表明:在低温空气中退火处理,注入层对CO有敏感特性.应用薄膜XRD、XPS、RBS对注入层结构分析表明,注入层对CO的敏感特性是由于注入层形成SnO_2、BaSnO_3等沉淀相引起的,同时还与离子注入引起的缺陷团有关.

A study has been made on the pulse Sn ion beam implantation in the surface of BaTiO3 PTC ceramic. It shows that the implanted layer has sensitivity to CO gas after annealing at lower temperature in air. Analyses with XRD, XPS,RBS has presented that such sensitivity to CO is due to SnO2,BaSnO3 formation in the implanted layer. It's also related with the fluster of defect aroused by ion implanting.