二元光学元件激光直接写入设备的研制

Manufacture of Laser Direct Lithography Equipment of Binary Optics Elements

本文介绍了二元光学元件制作的基本情况 ,国外制作二元光学元件设备的发展情况及国内制作二元光学元件设备的现状。重点介绍了长春光机所研制的二元光学元件激光直接写入设备中机械总体方面的主要关键技术 ,给出了导轨、传动系统、回转轴系、调焦伺服机构的主要技术指标和完成情况。另外还介绍了临界角法的调焦原理及实现光学调焦的调焦机构。

The paper describes the development state of manufacturing binary optical element's equipment in abroad and the present situation of it in home. It explains mainly essential techniques on the mechanical overall aspect on binary optical element's laser direct lithography equipment which has been manufactured by us. Simultaneous, it still gives the essential technology indexes and development state of slideway, transmission systems, round journal and focusing servo. The paper also introduces the focusing principle of critical angle and focusing mechanism of achieving optical focusing.