激光干涉仪测量失真正弦波形位移误差估计式

Error Evaluation Formula of Measuring Harmonic Distortional Sine Wave's Amplitude with Laser Interferometer

本文在分析介绍了激光干涉仪测量位移原理的基础上 ,指出了标准振动台稳态正弦绝对校准法中 ,激光干涉仪测量的只是工作台面运动的路程而非矢量位移 ,因此对于测量含有谐波失真的正弦波形将引入测量原理性误差。文中利用波形加速度失真度系数详细推导并给出了谐波失真所引入的测量误差的估计式 ,对准确评价传感器校准精度具有重要意义 ,同样也有助于我们对激光干涉仪测量精度的认识。

In this paper, the principle of measuring displacement using laser interferometer is introduced. Then, it is pointed out that which measured by laser interferometer is not its vector displacement in the primary vibration calibration system but the work table's distance. Therefore, the measuring principle error is analyzed for harmonic distortional sine wave with it. A new error evaluation formula is presented and proved with wave's acceleration distortional coefficient. The result is important for appraising calibration precision of vibration transducers, and it can also helps to acquired measuring precision of laser interferometer.