摘要
本文介绍用T矩阵方法来计算表面缺陷散射场时所用到的几个特殊函数的计算机数值编程方法。主要是球贝塞耳函数的算法、球汉克函数的算法、函数dn0m(θ)的算法和T矩阵的算法。所用编程语言为Delphi6.0。
In this paper, we will introduce the computer programming methods of several special functions which are used in calculation of the surface defects' scattered field by T-matrix method. It primarily includes the algorithms of the Bessel function , the Hankel function, the d^n_(0m)(θ) function and T-matrix ,and uses Delphi6.0.
出处
《光散射学报》
2004年第2期153-158,共6页
The Journal of Light Scattering
关键词
VLSI制造
缺陷散射
T矩阵
数值算法
工程软件
VLSI manufacturing
defects scattering
T-matrix
numerical algorithms
engineering software
