摘要
用抛光铝合金作衬底在平行孪生靶的磁控溅射设备中制备出二氧化钛薄膜,薄膜厚度为500nm,XRD测量表明二氧化钛薄膜为锐钛矿型(anatase)。该薄膜在紫外光源照射下,对甲苯、苯、二氧化硫及香烟气体有良好的降解作用;对大肠杆菌、金黄色葡萄糖菌有良好的去除作用。
TiO2 thin film with the depth of 500 nm was fabricated by using sputter method on alloy aluminum substrate. XRD measurement shows that the TiO2 film was at different anastasia phases. While photo of SEM measurement shows it's grain size was in the range of 30-50 nm. Under ultraviolet light, volatile organic compounds (benzene, toluene, formaldehyde, etc.) were gradually degraded. The smoking gas and SO2 gas were destroyed to 98.7% and 82.4% after an hour, respectively. After l0 min the removing efficiency of TiO2 film to bacteria was up to 100%.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2004年第4期489-490,494,共3页
Journal of Functional Materials
关键词
磁控溅射
二氧化钛薄膜
锐钛矿
光催化
Aluminum alloys
Bacteria
Benzene
Formaldehyde
Grain size and shape
Magnetron sputtering
Photocatalysis
Scanning electron microscopy
Smoke
Substrates
Sulfur dioxide
Thin films
Titanium dioxide
Toluene
Ultraviolet lamps
Volatile organic compounds
X ray diffraction analysis
