微动工作台中弹性导轨的设计计算

Construction and Calculation of Elastic Guide in Micro Displacement Worktable

介绍了微动工作台中弹性板簧导轨的设计方法、特性误差的计算 ,重点叙述了载荷反对称布置的弹性导轨使微动台产生独立转动自由度的方法 .与以柔性铰链为主体的平面三自由度微动工作台相比 ,弹性板簧导轨式的微动工作台力学模型简单 ,无原理误差 ,从而提高了工作台的位移精度 ,避免工作台在各运动方向之间的耦合 .在板簧上粘贴应变片还可以测出微动台的位移 ,简化了测量系统 .

This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable. It emphasizes on the method with which the independent wheeling degrees of freedom in worktable can be produced by elastic guide loaded dissymmetrically. Compared with the micro displacement worktable of three degrees of freedom bodied by flexible gemel, the micro displacement worktable of elastic leaf spring guide has some advantages. For example, its freedom from principle errors and its simplicity in mechanical modelling. Therefore high displacement accuracy can be obtained and the coupling between moving directions of the worktable is avoidable. Synchronously ,we can get the displacement by pasting strain slice on the elastic guide, thus simplifying the measuring system.