摘要
By combination of DC reactive magnetron sputter i ng with multiple arcplating, the alternating C 3 N 4 /TiN compo und film is deposited onto HSS. The core level binding energy and the contents o f carbon and nitrogen are characterized by X\|ray photoelectron spectrum. X\|ray diffraction(XRD) shows that compound thin film contains hard crystalline phases of α \|C 3 N 4 and β \|C 3 N 4 . The Knoop microhardne ss in the load range of 50.5\|54.1 GPa is measured. According to acoustic emissi on scratch test, the critical load values for the coatings on HSS substrates are in the range of 40\|80 N. The metal coated with C 3 N 4 /TiN compound f ilms has a great improvement in the resistance against corrosion. Many tests sho w that such a coating has a very high wearability. Compared with the uncoated an d TiN coated tools, the C 3 N 4 /TiN coated tools have a much longer cut ting life.
By combination of DC reactive magnetron sputter i ng with multiple arcplating, the alternating C 3 N 4 /TiN compo und film is deposited onto HSS. The core level binding energy and the contents o f carbon and nitrogen are characterized by X\|ray photoelectron spectrum. X\|ray diffraction(XRD) shows that compound thin film contains hard crystalline phases of α \|C 3 N 4 and β \|C 3 N 4 . The Knoop microhardne ss in the load range of 50.5\|54.1 GPa is measured. According to acoustic emissi on scratch test, the critical load values for the coatings on HSS substrates are in the range of 40\|80 N. The metal coated with C 3 N 4 /TiN compound f ilms has a great improvement in the resistance against corrosion. Many tests sho w that such a coating has a very high wearability. Compared with the uncoated an d TiN coated tools, the C 3 N 4 /TiN coated tools have a much longer cut ting life.
基金
SupportedbytheNationalNaturalScienceFoundationofChina(1 98750 37)
