超精密工件在线直线度多传感器测量方法

Multi-Probe Method of Ultraprecision On-Machine Straightness Measurement

在超精密加工中 ,用多测头方法测量工件直线度时 ,需要采用误差分离的方法分离出溜板的运动误差 ,并用一定的算法重构工件表面的直线度 .介绍了现有的各种算法 ,提出了两种新的无理论误差的精确算法以重构工件的直线度 .该算法适应于两点法或三点法测量长短工件 ,能评价任意 (包括光滑、非光滑、周期和非周期等 )表面 ,并允许采用大的测头间距 .仿真及实测结果表明了算法的优越性 。

In ultraprecision machining, multi probe methods are widely used for measuring the straightness error of the workpiece to separate the straightness motion error of the carriage. Certain algorithm is applied to reconstruct the straightness error. Various current algorithms are introduced and two kinds of novel exact algorithm for reconstructing the workpiece straightness error are proposed. These two kinds of algorithm are applicable for measuring long and short workpieces by using two point and three point methods. They are applicable for various types of surfaces including smooth, non smooth, periodic and non periodic ones and allow using large probe spacing. The results of computer simulation show the distinguishing feature of the algorithm. The proposed methods have been used to measure the straightness error on an ultraprecise granite grinding machine developed by authors.