摘要
频带反射腔控耿氏振荡器具有单调谐的特性,适于作为电量或非电量的有源传感器.本文介绍一种用于测量塑料薄膜厚度的腔控振荡器,频带反射腔用圆柱TE_(011)腔,工作在三公分波段,对于ε’_r≥2.0以上塑料薄膜,测量厚度的分辨率为±0.1μm,精度±0.75μm(开机半小时后,不进行零点校正),测量范围0～200μm.且可实现无接触测量,适于检验应用.
The analysis and the experimental result show that the Gunn diode oscillators controlled by the reflection within frequency band type cavity have mono-tuning property. The perfect active sensors which are available for electrical parameter and nonelectrical parameter. In this paper, a cavity controlled oscillator measuring the plastic film thickness is introduced. A cylindrical cavity of TE_(011). mode is used as the frequency band type reflection cavity. The TE_(011). cavity works in the 3cm frequency band. For the dielectric material of plastic film which ε_r>2.0, the thickness measuring resolution is of ± 0.1um, the precision is of ± 0.75um, the measuring range is of 0-200um, and we get non-contract measurment. It is suitable for examining application.
出处
《电子测量与仪器学报》
CSCD
1993年第1期34-39,共6页
Journal of Electronic Measurement and Instrumentation
关键词
有源传感
腔控振荡器
薄膜厚度
Active sensor
Cavity controlled oscillator
Film thickness
