摘要
在详细论述了激光多普勒测量仪的原理及测量方法后 ,对滚珠丝杠螺距误差的情况进行了分析 ,通过软硬结合的方法对重复定位误差和螺距误差的补偿进行了研究 。
On the basis of the discussion of the principle and measurement method of LDDM, this paper analyses the sources of the lead screw error. Compensation of repetitive position error and lead screw error is investigated by the software and hardware method, and the experiment verifies the effectiveness of the method.
出处
《机械科学与技术》
CSCD
北大核心
2004年第7期805-808,共4页
Mechanical Science and Technology for Aerospace Engineering
基金
教育部科学技术研究重点项目 (10 4111)资助
关键词
X-Y工作台
激光多普勒测量仪
螺距误差
定位精度
X-Y Table
LDDM(Laser Doppler Displacement Measurement)
Lead-screw error
Position accuracy
