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激光诱导化学气相沉积法制备纳米氮化硅及粉体光谱特性研究 被引量:7

Study on Preparation of Silicon Nitride Nano - Powder with LICVD Technique and the Optical Characteristics of the Powder
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摘要 氮化硅是优良的陶瓷材料,应用广泛。本文研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理,提出了减少游离硅的措施,利用双光束激发制备了超微的、非晶纳米氮化硅粉体。实验证明,纳米氮化硅粉体具有一些特殊的物理性能和光谱特性。 Silicon nitride is a kind of excellent ceramic material. It is used in many areas. In this paper, the general principles of LICVD (laser induced chemical vapor deposition) were investigated and the measures to reduce dissociated Si were put forward. By applying double beam optical stimulation, the ultrafine and amorphous Si3N4 nano powder which possesses many peculiar physical characteristics as well as optical features was obtained.
出处 《硅酸盐通报》 CAS CSCD 2004年第3期6-9,共4页 Bulletin of the Chinese Ceramic Society
关键词 激光诱导 化学气相沉积法 制备 纳米氮化硅 光谱特性 陶瓷材料 SI3N4 双光束激发 LICVD Si3N4 double beam optical stimulation infrared absorption spectra laman spectrum
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