离子束注入对人造金刚石表面改性的实验研究

Experimental Research on Surface Modification of Synthetic Diamond by Ion Beam Implantation

通过注入Ti离子对人造金刚石进行表面改性 ,利用X射线衍射和SEM观察金刚石改性前后的能谱变化和表面形貌变化 ,结果表明 ,除碳峰值外其它峰值明显增强 ,缺陷明显改善。用抗压强度仪测得改性后金刚石单晶抗压强度提高了 18%。将改性前后的金刚石工具在马弗炉和万能压机上进行测试 ,结果表明 ,改性后金刚石及其工具的寿命大大提高。离子注入法为提高金刚石和金刚石工具性能提供了一条有效的新途径。

Surface modification of synthetic diamond is achieved by implantation of Ti ions. The variations in energy spectrum and surface appearance of the synthetic diamond before and after its modification were observed by means of X-ray diffraction and scanning election microscopy. The results show that all peak values obviously increase and disadvantages markedly reduce except carbon's peak values. By compressive strength testing, it is found that the modified diamond monocrystals had a 18%, increase in compressive strength. The contrast tests of muffle furnace and universal press showed that the service life of the modified diamond and its tools is greatly increased. The ion implantation method has provided a effective and new process for improving the performance of synthetic diamond and its tools.