单晶硅各向异性湿法腐蚀机理的研究进展

Research Development on Wet Anisotropic Etching Mechanism of Crystal Silicon

介绍了硅各向异性腐蚀的含义、特点、用途以及常用的腐蚀剂等基本要素 ;着重论述了试图解释硅各向异性腐蚀行为的几种典型机理 。

The meanings,characteristics,purposes of the anisotropic etching of silcon and frequently used etchants etc.are introduced. And especially the explanations of anisotropic etching mechanisms of crystal silicon are emphasized on. Then a survey of the analysis on the etching mechanisms refered is made.