摘要
本文对微米量级微间隙的电击穿性能进行了研究,在制作出微间隙试样的基础上,改变徽间隙所处环境气氛以及间隙距离,测试了不同条件下的击穿电压V相对于气体压强P关系曲线,系统研究了N_2、O_2、Ar、He、Nc等环境气氛以及间隙距离对微间隙击穿性能的影响.对微间隙的静电击穿机制也进行了一些有益的探讨.
Several kinds of micro-gap specimens are prepared to simulate the gas discharge properties of micro-gap between stator and rotor of electrostatic micrometer. The discharge voltages of various micro-gaps of different distances and ambiences (N2, O2, Ar, He, Ne gases) are studied with changing the gap pressures. It is found out that the gas ambiences and distances have a great effect on the gas discharge voltages. The mechanism of gas discharge in micro-gaps is proposed as well.
出处
《电子器件》
CAS
1993年第2期54-59,共6页
Chinese Journal of Electron Devices
基金
国家自然科学基金资助项目
