摘要
介绍了一种用于微波电路的中功率薄膜衰减器。该衰减器是由铝原子含量为50％的Ta/Al合金薄膜制成。其性能优良。
This paper describes a middling-power thin Film attenuator used for microwave circuits. The attenuator is made from a Ta/Al thin film which contains aluminium of 50%.It is shown that the attenuator has higher performances.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1993年第2期203-206,共4页
Journal of University of Electronic Science and Technology of China
关键词
薄膜集成电路
衰减器
微波衰减器
thin film integrated circuit
Tantalum-base
attenuator
microwave attenuators
middling-power
