摘要
提出了一个很有价值的实验装置与方法,可以仅用一个平面磁控溅射靶来方便地合成各种金属多层膜。小角X光衍射(XRD)分析证实了采用此实验装置与方法制备的Fe/Al多层膜的良好周期性层状结构。
A very valuable apparatus and method are provided to synthesize various metallic multiayers easily only using a single planar magnetron target. The small-angle X-ray diffraction analysis indicates that the Fe/Al multilayers prepared by the apparatus and methods have the good periodic layered structure.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1993年第3期271-274,共4页
Journal of University of Electronic Science and Technology of China
关键词
磁控溅射靶
金属膜
层状结构
magnetron sputtering target
metal thin films
multilayers
layer structure
periodic layer structure
modulation period
