摘要
本文应用数值计算方法研究了表面光电压是表面非平衡少子浓度的单调函数这一假设对于同型外延材料的可应用性。我们发现这一假设对该材料一般地说并不成立。因此在使用等光伏表面光伏法测试同型外延材料少子扩散长度时一般不应把表面非平衡少子浓度视为常数。在文中,我们也分析了可以把表面非平衡少子浓度作常数处理的条件。
The applicability of the assumption, 'the surface photo-voltage is a monotonic function of the surface excess minority carrier density', to epitaxial material is studied by numerical analysis method. It is found that this assumption is unreasonable for epitaxial material in general. Therefore when the minority carrier diffusion length in epitaxial material is measured by the equal-surface-photo-voltage method, the surface excess minority carrier density should not be considered as a constant. In this paper, the condition under which the surface excess minority carrier density may be treated as a constant is also analysed.
基金
高纯硅及硅烷国家实验室资助课题
关键词
外延材料
扩散长度
表面光伏法
Epitaxial material
Diffusion length
Surface photo-voltage
