摘要
本文讨论作为集成电路元件的高性能双极型晶体管的现状和有关的工艺问题。
The state-of-the-art technologies of bipolar transistors for integrated circuit, in which bipolar transistors based on bulk silicon, silicon-on insulator and SiGe stained layer are included, are discussed.
关键词
双极集成电路
异质结
双极型晶体管
Silicon bipolar integrated circuit
SOI
SiGe/Si heterostruccure
HBT
Isolation technology
