溅射法制备Ag超微粒的研究

Study on the Ultrafine Ag Particles Produced by Sputtering Method

实验室制备超微粒的物理方法一般采用热蒸发法。我们用溅射法进行了Ag超微粒的制备。经XRD分析,存在Ag和简立方Ag_2O两种物相。为了研究此种方法制备的Ag超微粒在生成空间的分布状态以及Ag与Ag_2O两相的共存形式,采取了在空间不同角度上直接取样进行TEM分析。通过衍衬象和选区电子衍射分析了微粒粒径、形态及结晶物相随收集角的不同而产生的变化规律。

The ultrafine Ag particles produced in atmosphere of argon by sputtering method,have been studied with TEM.Observation and analysis show that,the sizes,size distributions,the shapes and the phases of the particles formed at varied emergent anyles are different.The particles consist of two phases:Ag and Ag_2O.