摘要
本文介绍一种用于电镜透镜球差矫正系统中的磁六极透镜的磁场分布实验测定原理及方法,并给出较详细的测量数据。测量结果说明这种透镜内磁场分布是以3θ为宗量的正弦和余弦规律,随r的变化是二次方规律。
This paper describes principle and method of experimental measurement of magnetic field distribution in a magnetic sextupole applying to a system for the correction of spherical aberation in electron lens as well as gives measurement data in a greater detail.The results of measuring show that the magnetic field distribution is the rule sin 3θor cos3θ and r^2.
出处
《电子显微学报》
CAS
CSCD
1993年第5期433-439,共7页
Journal of Chinese Electron Microscopy Society
基金
云南省教委应用基础研究基金
