摘要
本文讨论了差值取样数对氧化层电流弛豫谱(OCRS)分辨率与灵敏度的影响,给出了差值取样数七在实际分析过程中的最佳选择原则,研究了用计算机技术改善氧化层电流弛豫谱的灵敏度问题。
In this paper, the effect of difference sampling number on discriminability and sensitivity has been discussed for OCRS. An optimum seeking principle is given for difference sampling number, k, in OCRS analysis. An improvement on both discriminability and sensitivity for OCRS using computer technique is studied.
出处
《电子学报》
EI
CAS
CSCD
北大核心
1993年第2期22-27,共6页
Acta Electronica Sinica
关键词
差值取样
分辨率
灵敏度
MOS器件
Difference sampling number, Discriminability, Sensitivity, Oxide Current Relaxation Spectroscopy
