电子辐照下碳膜中氢原子行为的研究

The Behavior of Hydrogen in A-C : H Films Radiated by Electron Beam

本文通过共振核反应与红外吸收两种实验方法,对用PECVD法淀积的非晶碳膜中氢原子在不同剂量电子辐照下的行为,进行了深入的研究.不同剂量的电子辐照,使碳膜样品中的氢含量大小及氢原子的存在方式等有不同程度的变化.

Resonant nuclear reaction and infrared absorption experiments have been used to investigate the behavior of hydrogen atoms in amorphous carbon films radiated by different doses of electron beam. It has been found that different doses of electron radiation make the hydrogen concentration and the exist patterns of hydrogen atoms change in a different degree.