摘要
对受磁力驱动的机械微梁共振器进行了振动分析,得到了输出电压与输入电流之间的关系.据此关系,给出了该机械微梁共振器的等效电路表示.分析了共振器的尺寸对其特性的影响,研究结果表明,微梁共振器的品质因子随共振器的尺寸的减小而减小,共振频率不受空气阻尼的影响.
A design for an equivalent electric circuit of a magnetically-actuated mechanical beam resonator is presented. The beam, placed in a uniform magnetic field, is driven to vibrate transversely by Lorenz force generated by an electrical signal passing through a lead attached to the beam. Based on the dynamic analysis of beam resonator, the variation of output voltage with the input current is obtained and the electromechanical impedance of beam resonator is also obtained. This impedance leads to the equivalent electric circuit of a series parallel RLC circuit. The effect of beam size on the quality factor of the equivalent circuit is studied; the results show the quality factor will decrease as the beam size decreases.
