摘要
高能电子运动速度较大,相对论效应很明显。传统的卢瑟福弹性散射公式是由非相对论的薛定谔波动方程得出的,在预言高能电子束曝光时,需要对其进行相对论修正。采用Born近似解相对论的Dirac方程,得到相对论修正的卢瑟福公式。计算元素Si、O、C、H的弹性散射截面和散射角,与修正前的计算结果进行比较,结果表明,当电子能量达到100keV时,其相对论效应已经很明显。
Recently, High-energy electron beam lithography has attracted much attention. The velocity of high-energy electron is high, so the relativity effect must be tak- en into account in this case. The conventional Rutherford elastic scattering formula was based on non-relativistic wave equation of Schrdinger, so it must be corrected to predict the high-energy electron beam lithography. In this article, relativity correction of Rutherford formula is derived from the Dirac equation using Born's approximation. The elastic scattering cross-section and scattering angle of elements Si, O, C, H by relativistic Rutherford formula are calculated and the results are compared to that of non-relativistic Rutherford formula, which showed that the relativity effect is very clear in the case of 100 keV electron.
出处
《微细加工技术》
2004年第3期5-9,共5页
Microfabrication Technology
基金
中国科学院"引进海外杰出人才基金"2001年资助项目(20011215)
