双光子三维微细加工的分辨率研究

Analysis on the Resolution of Two-photon Three-dimensional Microfabrication

为了改善双光子加工的成型精度和微器件的质量,提高加工系统的分辨率是十分重要的。根据自由基类光聚合材料双光子加工分辨率的理论分析,提出等光强面概念,并在此基础上讨论了激发光强与系统加工分辨率之间的关系。通过不同光强条件下双光子三维加工固化单元的实验,验证了等光强面和系统分辨率之间的对应关系,并分析了出现微小差异的原因。根据上述理论模型,可以估算一定实验条件下系统可实现的加工分辨率,优化加工工艺参数。最后给出了部分微器件的成型结果。

To improve the molding accuracy of two-photon three-dimensional microfabrication and qualities of microstructures,upgrading the resolution power of fabrication system is very important.According to the theoretical analysis on two-photon microfabrication of free-radical photopolymer,the relationship between excitation power and resolution of fabrication system is discussed based on the concept of isocandela diagram.Through comparison of experiments results of three-dimensional solidified cells,the corresponding expression between the isocandela diagram and the resolution of fabrication system is verified and the difference between them is analyzed at the same time.Thus,with the help of the theoretical mode,the resolution of two-photon microfabrication system and the optimized process parameters can be estimated under certain experimental conditions.Finally,some examples of the microdevices fabricated with complex structure are given.