GaAs脊型波导Mach-Zehnder干涉调制器

GaAs RIB WAVEGUIDE MACH-ZEHNDER INTERFEROMETRIC MODULATOR

半导体电光波导调制器是半导体集成光学中具有代表性的器件之一,在光纤通讯、光信息处理等方面有着广阔的应用前景。它能和半导体激光器、探测器、电子线路等各种光、电元件实现单片集成,使设备和系统减少接口,缩小体积,提高可靠性。随着光通讯的发展,半导体调制器件的研究也越来越受到重视,在理论分析、结构设计、材料研制和器件工艺技术等方面也都取得了很大进展。由于GaAs材料具有良好的电、光性能,首先被用于制作GaAs光波导Mach-Zehnder干涉调制器中。

GaAs rib waveguide interferometric modulator with Schottky-barrier electrodes have been fabricated in n-/n+ GaAs by reactive ion etching and lift off mask techniques. The device total losses was 11.2 dB. An extinction ratio of -24.2 dB, and half wave voltage of Vz= 21V was obtained for single-mode optical systems operationg at 1.3 μm. The device principle, fabracation and character are introduced.