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用TEM分析溅射法制备Ag超微粒的空间分布

TEM Studies on the Distribution of the Ultrafine Ag Particles by Sputter Method
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摘要 用透射电镜对在氩气中电离溅射沉积于碳膜上的Ag超微粒进行了直接研究。通过明场象和电子衍射观察分析发现,在溅射入射角为60°时,经不同的出射角收集,形成的超微粒的粒径、粒径分布、形态和物相结构各有不同。 The ultrafine Ag particles, which were produced in an atmospher of argon by sputter me-thod, have been directely stuied by means of TEM. When the incidence angle was 30°, thesize, size distribution, shapes and the phase of the Ag particles were different according to thevarious emergence angle by observing and analysing the brightfield images and the electrondiffraction.
出处 《分析测试学报》 CAS CSCD 1993年第6期52-55,共4页 Journal of Instrumental Analysis
关键词 透射 电子显微镜 超细粉 Ultrafine particle Silver(Ag) Transmission elecron microscope(TEM)
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