氧化钨薄膜微型电化学器件的研究

Microelectrochemical Device of Tungsten Trioxide Thin Film

本文论述了WO_3薄膜氢离子敏器件的结构、原理、制备技术和测试分析。利用WO_3薄膜在H+溶液中由绝缘转化为导电特性,成功地研制成氢离子敏器件。这是一种简易而经济的微型pH敏器件技术。

The structure, principle. fabrication technology and performance test of WO3 based pH-sensitive device are described. WO3 thin film changes from isolator to conductor by hydrogen ion (H+ ) injection in electrochemical process. The pH-sensitive device is successfully fabricated by the sensitivity to H+ of WO3 thin film. It is a simple and lower-costed sensitive technique.