非晶硅太阳能电池生产工艺用氣分析方法研究

Analysis of Gases used in the Manufacture of Amorphous Silicon Solar Cells

本文对非晶硅太阳能电池制造工艺过程所用的无机氢化物烷类气体硅烷、硼烷、磷烷、甲烷和氢及其混合气的配制与分析方法进行了研究,以微机控制配气、检测程序、气相色谱法分成分析杂质,电容法测水分,方法已应用于工艺过程分析。

SiH_4,PH_4,B_2H_6,CH_4,H_2 and their mixture are used in the manufacture of amorphous silicon solar cells by chemical gas phase deposition method. The preparation and analytical methods of these gas mixtures have been studied in this paper. The gas supply system and the detection system were controlled by a micro-computer. The content of each substance above and the gaseous impurities were determined by gas chromatography. The moisture in the gases was measured with an electric capacity detector. All these methods have been applied in production process.