用于原位状态下的激光拉曼光谱测试系统的研制

Laser Raman Spectroscopic System for in-situ Testing

本文介绍了一种适合于表面结构研究的激光拉曼光谱原位测试系统,此系统由二个主要部分组成。其一是旋转光束装置,用于避免和减少激光束对所测样品表面的损伤.其二是原位石英拉曼样品池,它可以与气体处理系统连接,对样品进行原位的氧化,还原,反应及抽空等处理.本系统的突出特点是,在改善拉曼谱信噪比的同时,可进行真实状态下的各种原位激光拉曼光谱研究.

A laser Raman spectroscopic system for the in-situ study of surface structure is described. The system consists of two major parts. One is the rotating surface scanning device used for avoiding or decreasing damages to the sample surface by laser, the other is the insitu Raman quartz cell which is conn(?)ted to a gas handling systsm , so that the samples can be submitted to various pretreatments, such as oxidization, reduction, reaction and evacuation. The Raman spectra can be obtained under real conditions with better signal-to-noise ratio.