三种有机硅氧烷的等离子体聚合与聚合物复合膜的气体透过性

PLASMA POLYMERIZATON OF THREE ORGANOSILICON COMPOUNDS AND GAS PERMEABILITY OF COMPOSITE MEMBRANE

在外极管式电容耦合反应器中,进行了六甲基二硅氧烷(M_2),六甲基环三硅氧烷(D_3)和八甲基环四硅氧烷(D_4)的等离子体聚合,聚合物沉积在多孔聚丙烯底膜上。这些复合膜表现出不同的透气性能,其中六甲基二硅氧烷等离子体聚合复合膜表现出最大的氧氮选择性。应用IR,XPS、SEM等手段对聚合膜进行了表征。

Plasma Polymerization of three organosilicon compounds, hexamethyldisiloxane (M_2), hexamethylcyclotrisiloxane (D_3), octamethylcyclotetrasiloxane(D_4), were carried out in a capacitively coupled tuber reactor with external electrodes.Polymers were deposited on the porous polypropylene substrase. Gas perineability ofthese composite membranes were studied. These composite membrancs showed highoxygen permeabitity of 3.7--15×10^(-9) cm^3 (STP) /cm^2_(·S·)Pa. The compositemembrane prepared from M_2, showed the highest oxygen/nitrogen separation factor of3.1. The deposited films were investigated by IR, XPS and SEM.