RF MEMS开关开启电压的计算方法研究

Study on the Computation of RF MEMS Switch's Actuation Voltage

对桥式RF MEMS开关开启电压的计算方法进行了研究，通过建立力电耦合模型，解联立方程组，得到了开启电压关于各项开关参数的表达式．同时分析了开关的各个参数对其开启电压的影响．

The computation of RF MEMS switch's actuation voltage was studied.By building a coupled force-current model,the simultaneous equations were soluted and the expressions of switch parameters about actuation voltage were acquired.And these parameters' influence on actuation voltage was analysed.