投影光刻机调焦调平传感技术的研究进展

Progress in Focus and Level Sensor for Projection Lithography System

阐述了投影光刻机调焦调平传感器的重要作用及其技术进展,详细介绍了国际上典型的调焦调平传感器,并对多种传感技术的光学原理和关键技术进行了分析和比较。

Importance and technical progress of focus and level sensor for projection lithography system are introduced.Some typical focus and level sensors are described and their principles and key techniques are analyzed and compared.