摘要
九工位智能超声波清洗机的开发和应用是北京真空电子器件研究所对清洗工艺技术改造的一种尝试。本文介绍了该清洗机的策划、设备性能、结构特点、控制能力以及实际应用效果。
The development and usage of a 9-position intelligent ultrasonic cleaning machine was the attemptto improve the cleaning technology in an institute engaged in the development and manufacture of vacuumelectron devices. The design mastermind, equipment properties, construction characteristics, control capabil-ity and practical effects of the cleaning machine is introduced in the paper.
关键词
水基清洗机
超声波
自动化
多程序在线运行
Aqueous cleaning machine
Ultrasonic
Automation
Multiprogrammed online operation.