摘要
超纳米金刚石(UNCD)是一种全新的纳米材料,具有许多独特性能。介绍了Si微尖和微尖阵列阴极沉积超纳米金刚石薄膜的工艺及其场发射特性。研究发现,适当的成核工艺和微波等离子体化学气相沉积工艺可在Si微尖上沉积一层光滑敷形的金刚石薄膜;沉积后阴极的电压 电流特性、发射电流的稳定性以及工作在氧气环境下的发射特性都获得明显提高。讨论了超纳米晶金刚石薄膜阴极的发射机理。
Ultrananocrystalline diamond (UNCD) is a type of nano-material with a number of unique pro-perties. This paper presents a process for depositing nanocrystalline diamond thin films on Si micro-tips and micro-tip arrays, and the field emission properties of the coated cathodes. With proper processing conditions, the coated UNCD thin films are extremely smooth and conformal to the shape of Si tips. For the coated Si micro-tip cathodes, the current-voltage characteristics, the stability of emission current and the emission properties in oxygen environment are substantially improved compared to the uncoated ones. The emission mechanism of UNCD is discussed.
出处
《液晶与显示》
CAS
CSCD
2004年第4期239-243,共5页
Chinese Journal of Liquid Crystals and Displays
基金
国防科技重点实验室基金资助项目(No.51440010103DZ2203)
关键词
超纳米金刚石薄膜
场发射
微波等离子体化学气相沉积
ultrananocrystalline diamond thin films
field emission properties
microwave plasma chemical vapor deposition