超细氮化硅粉的组成分析和评估

COMPOSITION ANALYSIS AND EVALUATION ON ULTRA FINE SILICON NITRIDE POWDER

采用X荧光光谱、等离子发射光谱、原子吸收光度、气相色谱以及重量法、容量法等多种分析技术对超细氮化硅粉中硅、氮、氧、氯根、水分及金属杂质等组成进行了分析方法研究。确定了测值可信且再现性好的分析方法。通过程序升温、红外检测及微机解卷重叠峰形,探讨了氮化硅中不同状态的氧量,进而对主相量作出评估。国内用高频等离子法和激光诱导合成的氮化硅超细粉,主相量均达97％以上,其组成式接近为Si_(30)N_(10)O。

The analysis methods used for analysing compositions of sil-icion, nitrogen, oxygen, chloride anion, moisture and matel impurity in Si3N4 ultra fine powder were investigated. Various techniques had been performed, such as XRF, ICP, GC, AAS and gravimetry or volumetry etc. The methods with better reliability and reproducibility were determined. By using program warm-up, infrared measure and deconvolution for overlap peak, the oxygen content in different state was explored and the main phase amount of Si3N4 was evaluated. The domestic Si3N4 ultra fine powder synthesized by high frequency plasma and laser induced reaction have main phase amount over then 97 %. Its stechiometric formula is nearly Si30N40O.